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| D. Fukuda, K. Watanabe, Y. Kanazawa, and M. Hashimoto, "Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-The-Fly Etching Process Modification," IEICE Trans. Fundamentals of Electronics Communications and Computer Sciences, E98-A(7), pp. 1467--1474, July 2015. | |
| ID | 807 |
| 分類 | 論文誌 |
| タグ | |
| 表題 (title) |
Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-The-Fly Etching Process Modification |
| 表題 (英文) |
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| 著者名 (author) |
D. Fukuda,K. Watanabe,Y. Kanazawa,M. Hashimoto |
| 英文著者名 (author) |
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| キー (key) |
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| 定期刊行物名 (journal) |
IEICE Trans. Fundamentals of Electronics Communications and Computer Sciences |
| 定期刊行物名 (英文) |
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| 巻数 (volume) |
E98-A |
| 号数 (number) |
7 |
| ページ範囲 (pages) |
1467--1474 |
| 刊行月 (month) |
7 |
| 出版年 (year) |
2015 |
| Impact Factor (JCR) |
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| URL |
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| 付加情報 (note) |
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| 注釈 (annote) |
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| 内容梗概 (abstract) |
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| 論文電子ファイル | 利用できません． |
| BiBTeXエントリ |
@article{id807,
title = {Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-the-Fly Etching Process Modification},
author = {D. Fukuda and K. Watanabe and Y. Kanazawa and M. Hashimoto},
journal = {IEICE Trans. Fundamentals of Electronics Communications and Computer Sciences},
volume = {E98-A},
number = {7},
pages = {1467--1474},
month = {7},
year = {2015},
}
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