論文誌

[1] D. Fukuda, K. Watanabe, Y. Kanazawa, and M. Hashimoto, "Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-The-Fly Etching Process Modification," IEICE Trans. Fundamentals of Electronics Communications and Computer Sciences, volume E98-A, number 7, pages 1467--1474, July 2015.

[2] D. Fukuda, K. Watanabe, N. Idani, Y. Kanazawa, and M. Hashimoto, "Edge-Over-Erosion Error Prediction Method Based on Multi-Level Machine Learning Algorithm," IEICE Trans. on Fundamentals of Electronics, Communications and Computer Sciences, volume E97-A, number 12, pages 2373--2382, December 2014.