著者名 (author) 表題 (title) 論文誌/会議名 巻数 (volume) 号数 (number) ページ範囲 (pages) 刊行月 (month) 出版年 (year) File
論文誌
D. Fukuda, K. Watanabe, Y. Kanazawa, M. Hashimoto
Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-the-Fly Etching Process Modification
IEICE Trans. Fundamentals of Electronics Communications and Computer Sciences
E98-A
7
1467--1474
July
2015

論文誌
D. Fukuda, K. Watanabe, N. Idani, Y. Kanazawa, M. Hashimoto
Edge-over-Erosion Error Prediction Method Based on Multi-Level Machine Learning Algorithm
IEICE Trans. on Fundamentals of Electronics, Communications and Computer Sciences
E97-A
12
2373--2382
December
2014


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