論文誌
[1]  D. Fukuda, K. Watanabe, Y. Kanazawa, and M. Hashimoto, ``Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-The-Fly Etching Process Modification,'' IEICE Trans. Fundamentals of Electronics Communications and Computer Sciences, vol. E98-A, no. 7, pp. 1467--1474, July 2015.
[2]  D. Fukuda, K. Watanabe, N. Idani, Y. Kanazawa, and M. Hashimoto, ``Edge-Over-Erosion Error Prediction Method Based on Multi-Level Machine Learning Algorithm,'' IEICE Trans. on Fundamentals of Electronics, Communications and Computer Sciences, vol. E97-A, no. 12, pp. 2373--2382, December 2014.

This site is maintained by Onoye Lab.

PMAN 2.5.5 - Paper MANagement system / (C) 2002-2008, Osamu Mizuno / All rights reserved.