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分類 論文誌
著者名 (author) D. Fukuda,K. Watanabe,Y. Kanazawa,M. Hashimoto
英文著者名 (author)
キー (key)
表題 (title) Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-the-Fly Etching Process Modification
表題 (英文)
定期刊行物名 (journal) IEICE Trans. Fundamentals of Electronics Communications and Computer Sciences
定期刊行物名 (英文)
巻数 (volume) E98-A
号数 (number) 7
ページ範囲 (pages) 1467--1474
刊行月 (month) July
出版年 (year) 2015
付加情報 (note)
注釈 (annote)
内容梗概 (abstract)
論文電子ファイル Not available.


[0-173]  D. Fukuda, K. Watanabe, Y. Kanazawa, and M. Hashimoto, ``Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-The-Fly Etching Process Modification,'' IEICE Trans. Fundamentals of Electronics Communications and Computer Sciences, vol. E98-A, no. 7, pp. 1467--1474, July 2015.

@article{0_173,
    author = {D. Fukuda and K. Watanabe and Y. Kanazawa and M. Hashimoto},
    author_e = {},
    title = {Modeling the Effect of Global Layout Pattern on Wire Width
    Variation for On-the-Fly Etching Process Modification},
    title_e = {},
    journal = {IEICE Trans. Fundamentals of Electronics Communications and
    Computer Sciences},
    journal_e = {},
    volume = {E98-A},
    number = {7},
    pages = {1467--1474},
    month = {July},
    year = {2015},
    note = {},
    annote = {}
}

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